Delivery of reactive gas from gas pad to process tool
August 24, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 2872397 3029575 3226914 3279153 Gas supply system with purge means Recovery of hydrocarbon components from a hydrocarbon-carrier gas mixture Purging apparatus Methods for obtaining high-purity carbon monoxide Vacuum deposition system with improved mass flow control Process and apparatus for the low pressure chemical vapor deposition of thin films InventorApplicationNo. 572834 filed on 08/24/1990US Classes:137/240, With separate material addition95/131, Halogen or halogen containing compound sorbed141/83, WITH TESTING OR WEIGHING RECEIVER CONTENT141/89, With cleaning, coating or drying means222/148WITH CLEANING MEANSExaminersPrimary: Walton, George L.Attorney, Agent or FirmInternational ClassesB08B 009/02B08B 009/06 AbstractRemote delivery system for potentially toxic moisture sensitive process gas to a point of use (e.g. CVD system).Field of SearchCleaning or steam sterilizingWith separate material addition Conduit cleaner Conduit cleaner Conduit cleaner Conduit cleaner WITH CLEANING MEANS Gas or variation of gaseous condition in receiver With filling with fluent non-gaseous materials Vacuum With material treatment WITH SOIL REMOVING, COATING, LUBRICATING, STERILIZING AND/OR DRYING With cleaning, coating or drying means Hollow work internal cleaning, e.g., bag and/or bottle cleaners | |
