U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Micromachined silicon potentiometer responsive to pressure

Patent 5132658 Issued on July 21, 1992. Estimated Expiration Date: Icon_subject April 19, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

3093806

3174125

3418850

Pressure responsive sender
Patent #: 4079351
Issued on: 03/14/1978
Inventor: Levine

Force transducer
Patent #: 4479392
Issued on: 10/30/1984
Inventor: Froeb ,   et al.

Microminiature force-sensitive switch
Patent #: 4543457
Issued on: 09/24/1985
Inventor: Petersen ,   et al.

Method and apparatus for sensing tactile forces
Patent #: 4555954
Issued on: 12/03/1985
Inventor: Kim

Catheter tip pressure transducer Patent #: 4722348
Issued on: 02/02/1988
Inventor: Ligtenberg ,   et al.

Inventors

Assignee

Application

No. 511656 filed on 04/19/1990

US Classes:

338/92, Resistance element adjustably short-circuited338/42, Diaphragm338/47Force-actuated

Examiners

Primary: Lateef, Marvin M.

Attorney, Agent or Firm

International Classes

H01C 010/06
H01C 010/10

Abstract

A silicon pressure chip operates in a two-wire resistive mode. A thin-film resistor located on a long silicon beam which is the thicker portion of a thin diaphragm is partially shorted out by a metallized deflection stop. The pressure response of the resistor is determined by the resistor layout.

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