Mass flow controller with supplemental condition sensors
Patent 5129418 Issued on July 14, 1992. Estimated Expiration Date: 
November 13, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
November 13, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesFluid flow control system Programmable pressure regulator for titanium superplastic forming apparatus Mass flow controller apparatus Patent #: 4487213 InventorsAssigneeApplicationNo. 612328 filed on 11/13/1990US Classes:137/486, Responsive to change in rate of fluid flow137/487.5Electrically actuated valveExaminersPrimary: Cohan, AlanAttorney, Agent or FirmInternational ClassG05D 007/06Foreign Application Priority Data1989-11-14 JPAbstractAn improved mass flow controller can be connected to a passageway of a fluid, and can utilize a sensor unit for measuring a characteristic of the mass flow, and deriving a corresponding flow rate signal. Supplemental condition sensors can measure other parameters of the flow rate independent of their utilization in determining the actual flow rate, and can monitor and compare the current value of these sensor conditions, with standards to thereby monitor the operational performance of the mass flow controller. | |
