Piezoelectric wavefront modulator
Deformable mirror light modulator
Mirror array light valve
Optical display device
Large active screen display Patent #: 4909611
ApplicationNo. 637892 filed on 01/04/1991
US Classes:359/291, Shape or contour of light control surface altered257/E21.259, Organic layers, e.g., photoresist (EPO)359/295Having multiple electrodes
ExaminersPrimary: LaRoche, Eugene R.
Assistant: Lester, Evelyn A.
Attorney, Agent or Firm
International ClassG02B 026/00
AbstractDMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructure on top of an underlying CMOS address circuit. The CMOS chip surface contains several processing artifacts that can lead to reduced yield for the DMD superstructure. A modified DMD architecture and process are disclosed that minimizes the yield losses caused by these CMOS artifacts while also reducing parasitic coupling of the high voltage reset pulses to the underlying CMOS address circuitry.