Multidimensional force sensor
Patent 5095762 Issued on March 17, 1992. Estimated Expiration Date: 
May 11, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
May 11, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3304787 3693425 Planar semiconductor three direction acceleration detecting device and method of fabrication Accelerometer Micromachined accelerometer with electrostatic return Process for the production of a piezoresistive gauge and to an accelerometer incorporating such a gauge Acceleration detecting apparatus formed by semiconductor Multidimensional force sensor Patent #: 4951510 InventorsAssigneeApplicationNo. 522515 filed on 05/11/1990US Classes:73/862.041, Responsive to multiple loads or load components73/382R, GRAVITATIONAL DETERMINATION73/514.32, Capacitive sensor73/514.33, Resistive sensor73/862.626, Inductance or capacitance sensor73/866.5PROBE OR PROBE MOUNTINGExaminersPrimary: Ruehl, Charles A.Attorney, Agent or FirmForeign Patent References
International ClassesG01L 005/16G01L 001/14 AbstractA multibeam structure measures displacement of one or more response elements to detect multiple components of applied force. The flexible beams are each coupled to a response element which may be displaced by a force arising from linear acceleration, angular acceleration, fluid flow, electric/magnetic/gravitational fields, and others sources. The displacement of the response element is detected with a variety of sensing methods including capacitive and piezoresistive sensing.Other References
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