Interferometric pressure sensor capable of high temperature operation and method of fabrication

Patent 5087124 Issued on February 11, 1992. Estimated Expiration Date:

May 9, 2009. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

Optical micropressure transducer Patent #: 4926696
Issued on: 05/22/1990
Inventor: Haritonidis, et al.

Inventors

Application

No. 349231 filed on 05/09/1989

US Classes:

356/482, For distance or displacement measurement250/227.27With coherent interferrometric light

Examiners

Primary: Willis, Davis L.
Assistant: Koren, Matthew W.

Attorney, Agent or Firm

Kilpatrick & Cody

International Class

G01B 009/02

Abstract

An interferometric-based pressure transducer is fabricated from two layers of silicon having different crystal orientations which have been processed using selective anisotropic etching to produce in one silicon layer a mirror surface and a groove that is aligned with the mirror, and a pressure-responsive membrane in the other layer. The layers are joined with the membrane opposite the mirror, and an optical fiber is secured in the groove so that light from the optical fiber is conveyed by the mirror surface between the membrane and the optical fiber. Conventional interferometric apparatus compares transmitted and received light in order to sense deformation of the membrane and thereby sense pressure.

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