Multidimensional force sensor
Patent 5083466 Issued on January 28, 1992. Estimated Expiration Date: 
May 11, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
May 11, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3304787 Non-contacting device for sensing multi-component motion Planar semiconductor three direction acceleration detecting device and method of fabrication Device for measuring force Micromachined accelerometer with electrostatic return Acceleration detecting apparatus formed by semiconductor Patent #: 4891984 InventorsAssigneeApplicationNo. 522528 filed on 05/11/1990US Classes:73/862.041, Responsive to multiple loads or load components73/514.33, Resistive sensor73/862.626Inductance or capacitance sensorExaminersPrimary: Ruehl, Charles A.Attorney, Agent or FirmForeign Patent References
International ClassesG01L 005/16G01P 015/12 AbstractA multibeam structure measures displacement of one or more response elements to detect multiple components of applied force. The flexible beams are each coupled to a response element which may be displaced by a force arising from linear acceleration, angular acceleration, fluid flow, electric/magnetic/gravitational fields, and others sources. The displacement of the response element is detected with a variety of sensing methods including capacitive and piezoresistive sensing. | |
