Microwave chemical vapor deposition apparatus and feedback control method

Patent 5069928 Issued on December 3, 1991. Estimated Expiration Date:

January 27, 2009. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

Activated gas generator
Patent #: 4207452
Issued on: 06/10/1980
Inventor: Arai

Ion generating apparatus and method for the use thereof
Patent #: 4507588
Issued on: 03/26/1985
Inventor: Asmussen , et al.

Plasma processing apparatus Patent #: 4831963
Issued on: 05/23/1989
Inventor: Saito , et al.

Inventors

Assignee

Canon Kabushiki Kaisha

Application

No. 302244 filed on 01/27/1989

US Classes:

427/575, Generated by microwave (i.e., 1mm to 1m)118/723MR, With magnet (e.g., electron cyclotron resonance, etc.)219/686, Gas environment (e.g., pressurized, etc.)219/696, With tuning315/39, Discharge device load with distributed parameter-type transmission line (e.g., wave-guide, coaxial cable)315/111.21Plasma generating

Examiners

Primary: Beck, Shrive
Assistant: Owens, Terry J.

Attorney, Agent or Firm

Fitzpatrick, Cella, Harper & Scinto

Foreign Patent References

57-133636 JP. 08/21/1982
58-49295 JP. 03/21/1983
59-43991 JP. 03/21/1984
62-36240 JP. 09/21/1987
63-100186 JP 05/21/1988
88/10506 WO 12/21/1988

International Class

C23C 016/50

Foreign Application Priority Data

1988-02-01 JP

Abstract

A microwave plasma CVD apparatus includes a hermetically sealed vacuum vessel, a device for evacuating the vacuum vessel, and a device for introducing microwaves through a microwave transmission circuit into the vacuum vessel to produce a plasma within the vacuum vessel. The microwave transmission circuit includes a cavity resonator integrally provided with two matching circuits, one of which is a plunger for varying the length of the cavity resonator and the other of which is a pair of sliding matching irises. Feedback in the apparatus can be controlled by driving one of the matching circuits for rough matching of the microwave impedance and driving the other matching circuit for fine matching of the microwave impedance, so that the calculated ratio of the reflected power to the input power, based on a signal from a power monitor, is reduced to a minimum.