Patent ReferencesScanning tunneling microscope installed in electron microscope Tunneling scanning microscope having light source Contactless current probe based on electron tunneling Electron microscope equipped with scanning tunneling microscope Scanning type tunnel microscope Microscope apparatus Tunnel current detecting photo-acoustic spectrometer Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control Scanning micromechanical probe control system Patent #: 4952857 InventorApplicationNo. 546281 filed on 06/29/1990US Classes:378/53, Composition analysis250/306, INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES250/308, Including a radioactive source378/43, Telescope or microscope378/51AbsorptionExaminersPrimary: Howell, Daniel W.Assistant: Chu, Kim-Kwok Attorney, Agent or FirmInternational ClassG01N 023/06AbstractA scanning spectral-analysis micro-probe subsystem, for a surface imaging system, utilizes a micro-probe to detect the precise position of a point on a sample object surface having surface dimensions changing responsive to surface absorption of incident radiation from a modulated radiation source. The modulated incident radiation causes the sample region dimensions, in the vicinity of the micro-probe, to be modulated, so that the micro-probe detects this dimensional modulation, with a detected modulation strength directly proportional to the incident radiation absorption. | |