U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Scanning analysis and imaging system with modulated electro-magnetic energy source

Patent 5060248 Issued on October 22, 1991. Estimated Expiration Date: Icon_subject June 29, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

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Inventor: Wickramasinghe

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Inventor

Application

No. 546281 filed on 06/29/1990

US Classes:

378/53, Composition analysis250/306, INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES250/308, Including a radioactive source378/43, Telescope or microscope378/51Absorption

Examiners

Primary: Howell, Daniel W.
Assistant: Chu, Kim-Kwok

Attorney, Agent or Firm

International Class

G01N 023/06

Abstract

A scanning spectral-analysis micro-probe subsystem, for a surface imaging system, utilizes a micro-probe to detect the precise position of a point on a sample object surface having surface dimensions changing responsive to surface absorption of incident radiation from a modulated radiation source. The modulated incident radiation causes the sample region dimensions, in the vicinity of the micro-probe, to be modulated, so that the micro-probe detects this dimensional modulation, with a detected modulation strength directly proportional to the incident radiation absorption.

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