Optical mask filter capable of reducing the semiperiodic component of temporal variation in endpoint detection
Patent 5059784 Issued on October 22, 1991. Estimated Expiration Date: 
March 30, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
March 30, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesApparatus for treatment with gas plasma Automatic computing color meter Optical sensing device Patent #: 4314760 InventorApplicationNo. 502400 filed on 03/30/1990US Classes:250/237R, Hoods, grating, baffles, diaphragms, masks250/227.29With specific illumination or viewing orientation of light conductor relative to viewed object (e.g., light normal to, and detector at 45 degree angle to, viewed object)ExaminersPrimary: Nelms, David C.Assistant: Le, Que T. Attorney, Agent or FirmInternational ClassH01J 040/14AbstractA mask for reducing a semiperiodic variation of an output signal produced in response to a semiperiodic temporal variation of a distribution of radiation incident on the input of a detector. The mask can have a transmitance that changes abruptly at an outer profile of an opaque region or can have a varation in transmittance that varies continuously.Other References
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