Illumination system and inspection apparatus including same

Patent 5058982 Issued on October 22, 1991. Estimated Expiration Date:

August 10, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

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Inventor

Katzir, Yigal

Assignee

Orbot Systems Ltd.

Application

No. 565489 filed on 08/10/1990

US Classes:

385/33, Lens385/15, WITH OPTICAL COUPLER385/901ILLUMINATING OR DISPLAY APPARATUS

Examiners

Primary: Sikes, William L.
Assistant: Wise, Robert E.

Attorney, Agent or Firm

Myers, Rose & Liniak

Foreign Patent References

57-19712A JP. 02/13/1982
59-123980A JP. 07/13/1984
2142444A GB. 01/13/1985

International Class

G02B 006/32

Abstract

An illumination system particularly useful for inspecting a workpiece by an optic scanner includes darkfield illumination produced mainly by two elongate light sources each having a reflector focussing member and a lenticular lens sheet spreading the light from its light source over its reflector focussing member to produce an approximate image of its light source on the line to be scanned. The illumination system further includes brightfield illumination produced mainly by a third elongate light source mounted laterally of the scanner optic axis, a refractive focussing member, and a further lenticular lens sheet producing an approximate image of the third light source on the line to be scanned. A beamsplitter aligned with the scanner optic axis reflects the light from the refractive focussing member towards the workpiece, and conducts therethrough both the darkfield and brightfield illumination reflected from the workpiece to the optic scanner.

Other References

LaMuth, "Measurements on Lambertain Objects: Some Novel Approaches", Applied Optics, vol. 14, No. 5, May 1975, pp. 1150-1155
Advertisement, "High Irradiance Reflectors", Vortek Industries Ltd. (2 pgs.), Dec. 12, 1990
Snail, "Reflectometer Design Using Nonimaging Optics", (draft; copy in file history of U.S. Pat. No. 4,815,858 to Snail, issued Mar. 23, 1989)
Brandenberg, "Focusing Properties of Hemispherical and Ellipsoidal Mirrors Reflectometers", J. Opt. Sci. Am., vol. 54, 10 (Oct. 1964) (incomplete copy)
Jacquez et al., "An Integrating Sphere for Measuring Diffuse Reflectance in the Near Infrared", J. Opt. Sci. Am., vol. 45, No. 10, (Oct. 1955), pp. 781-785
Gindele et al. "Spectral Reflectance Measurements Using an Integrating Sphere in the Infrared", Applied Optics, vol 24, No. 12, (Jun., 1985), pp. 1757-1760
Edwards et al., "Integrating Sphere for Imperfectly Diffuse Samples", Applied Optics, vol. 51, (Nov. 1961), pp. 1279-1288, (incomplete copy