Vertical heat-treatment apparatus having boat transfer mechanism
August 8, 2010. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesConsecutive wafer transfer apparatus and method Wafer transfer apparatus Apparatus for transferring semiconductor wafers Object handling apparatus Wafer cassette transfer mechanism Automatic wafer loading method and apparatus Wafer transfer method Heat-treating apparatus Patent #: 4938691 InventorAssigneeApplicationNo. 564318 filed on 08/08/1990US Classes:29/25.01, BARRIER LAYER OR SEMICONDUCTOR DEVICE MAKING414/404, For emptying contents thereof into portable receiving means414/940Wafer cassette transportingExaminersPrimary: Chaudhuri, OlikAssistant: Horton, Ken Attorney, Agent or FirmForeign Patent References
International ClassesH01L 021/68F27D 003/00 F27D 005/00 Foreign Application Priority Data1989-08-11 JPAbstractA vertical heat treatment apparatus heat-treats wafers horizontally carried in a boat while keeping the boat vertical in a reaction tube. The apparatus includes a system for transferring the wafers between the boat and wafer carriers, a system for loading and unloading the wafer-carried boat into and out of the reaction tube, and a system for waiting the boat in which not-treated wafers are carried. An arm is provided to move the boat while supporting the boat vertically. The boat is moved by the arm among a first position where the wafer transferring system is located, a second position where the load and unload system is located and a third position where the boat waiting system is located. A system for engaging with the top of the boat is further located at the first position to fix the top of the boat when the wafers are transferred to and out of the boat by the wafer transfer system. | |
