Abstract

A micromotor device for moving a micro-miniature element along a predetermined path comprises a membrane supported on a substrate having an upper planar surface for supporting the element to be moved and a lower surface. An ultrasonic transducer attached to one membrane surface is supplied with electrical power to produce ultrasonic energy and thereby cause a flexural wave action in the membrane. The membrane may be comprised of a layer of piezoelectric material in one embodiment or an electrically insulating amorphous material which utilizes an electrostriction phenomenon in another embodiment. The generated flexural wave action produces linear movement of one or more microelements on a membrane for a variety of applications. Control of the moving elements may be maintained using a linear position sensor which includes a circuit for producing feedback control signals.