Metalization systems for heater/sensor elements
September 30, 2008. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References H546 3540920 3664874 Solid state force transducer Method for fabricating ballasted finger electrode Method of preparing high-temperature-stable thin-film resistors Reactively sputtered chrome silicon nitride resistors Low power gas detector Thin film chromium-silicon-carbon resistor Thermal head and method for fabrication thereof InventorsAssigneeApplicationNo. 257074 filed on 09/30/1988US Classes:428/641, Ge- or Si-base component338/308, Resistance element coated on base428/615, Composite; i.e., plural, adjacent, spatially distinct metal components (e.g., layers, joint, etc.)428/660, Refractory (Group IVB, VB, or VIB) metal-base component428/661, Diverse refractory group metal-base components: alternative to or next to each other428/664, Alternative to or next to each other428/669Group IB metal-base component alternative to platinum group metal-base component (e.g., precious metal, etc.)ExaminersPrimary: Zimmerman, John J.Attorney, Agent or FirmForeign Patent References
International ClassH01C 007/02AbstractDevice comprising a substrate and a metallized sensor/heater element having a temperature coefficient of resistance of at least 2000 parts per million. Methods of fabricating the devices are also disclosed.Other References
Field of SearchResistance element coated on baseGe- or Si-base component Oxide Au-base component Electrical contact feature W-base component Components of differing electric conductivity Cr-base component Composite; i.e., plural, adjacent, spatially distinct metal components (e.g., layers, joint, etc.) Platinum group metal-base component Refractory (Group IVB, VB, or VIB) metal-base component Diverse refractory group metal-base components: alternative to or next to each other Alternative to or next to each other Group IB metal-base component alternative to platinum group metal-base component (e.g., precious metal, etc.) Resistor for current control (excludes heating element) Applying superposed diverse coatings or coating a coated base | |
