U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Pyrometer

Patent 4979133 Issued on December 18, 1990. Estimated Expiration Date: Icon_subject February 8, 2009. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Method of and system for measuring temperature and spectral factor
Patent #: 4411519
Issued on: 10/25/1983
Inventor: Tagami

Pyrometer #2
Patent #: 4647774
Issued on: 03/03/1987
Inventor: Brisk ,   et al.

Pyrometer apparatus
Patent #: 4657385
Issued on: 04/14/1987
Inventor: Pointer

Fiber optic pyrometry with large dynamic range
Patent #: 4679934
Issued on: 07/14/1987
Inventor: Ganguly ,   et al.

Apparatus for remote measurement of temperatures
Patent #: 4708493
Issued on: 11/24/1987
Inventor: Stein

Infrared electronic thermometer and method for measuring temperature
Patent #: 4797840
Issued on: 01/10/1989
Inventor: Fraden

Radiometric measurement of wafer temperatures during deposition
Patent #: 4823291
Issued on: 04/18/1989
Inventor: Berman

Temperature measurement Patent #: 4859065
Issued on: 08/22/1989
Inventor: Bibby

Inventors

Assignee

Application

No. 308432 filed on 02/08/1989

US Classes:

702/134, By radiant energy250/338.1, Infrared responsive356/45, Plural color responsive374/9, EMISSIVITY DETERMINATION374/121, By thermally emitted radiation374/123, Transparent material measurement or compensation (e.g., spectral line, gas, particulate suspension374/126, Having emissivity compensating or specified radiating surface374/161Change of optical property

Examiners

Primary: Teska, Kevin J.
Assistant: Zanelli, Michael J.

Attorney, Agent or Firm

Foreign Patent References

  • 56-130622 JP. 10/12/1981
  • 56-130623 JP. 10/12/1981
  • 38627 JP 02/12/1985
  • 60-54936 JP. 04/12/1985
  • 60-54937 JP. 04/12/1985
  • 61-30727 JP. 02/12/1986
  • 61-86621 JP. 05/12/1986
  • 61-29647 JP. 07/12/1986
  • 1213738 JP 09/12/1986
  • 62-1202 JP. 01/12/1987
  • 62-15424 JP. 01/12/1987

International Class

G01J 005/00

Foreign Application Priority Data

1988-02-08 JP

Abstract

A pyrometer according to the present invention calculates a temperature of a target to be measured by means of light emitting device for emitting reference light having three wavelengths to the target, and light measuring portions for measuring the intensity of the reference light, the intensity of light reflected by the target, the intensity of light transmitted through the target and the intensity of light radiated by the target, respectively with respect to each of the three wavelengths. The transmitted light measured value of the reference light transmitted through the target is used for temperature calculation in addition to the measured values of the reference light, the reflected light and the radiated light, and therefore even if the target is a semi-transparent object, the true temperature thereof can be calculated.

Other References

  • Applied Optics, R. J. Brown, B. G. Young, Dec. 1975, vol. 14, No. 12, pp. 2927-293
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