Patent ReferencesMethod of and system for measuring temperature and spectral factor Pyrometer #2 Pyrometer apparatus Fiber optic pyrometry with large dynamic range Apparatus for remote measurement of temperatures Infrared electronic thermometer and method for measuring temperature Radiometric measurement of wafer temperatures during deposition Temperature measurement Patent #: 4859065 InventorsAssigneeApplicationNo. 308432 filed on 02/08/1989US Classes:702/134, By radiant energy250/338.1, Infrared responsive356/45, Plural color responsive374/9, EMISSIVITY DETERMINATION374/121, By thermally emitted radiation374/123, Transparent material measurement or compensation (e.g., spectral line, gas, particulate suspension374/126, Having emissivity compensating or specified radiating surface374/161Change of optical propertyExaminersPrimary: Teska, Kevin J.Assistant: Zanelli, Michael J. Attorney, Agent or FirmForeign Patent References
International ClassG01J 005/00Foreign Application Priority Data1988-02-08 JPAbstractA pyrometer according to the present invention calculates a temperature of a target to be measured by means of light emitting device for emitting reference light having three wavelengths to the target, and light measuring portions for measuring the intensity of the reference light, the intensity of light reflected by the target, the intensity of light transmitted through the target and the intensity of light radiated by the target, respectively with respect to each of the three wavelengths. The transmitted light measured value of the reference light transmitted through the target is used for temperature calculation in addition to the measured values of the reference light, the reflected light and the radiated light, and therefore even if the target is a semi-transparent object, the true temperature thereof can be calculated.Other References
Field of SearchOPTICAL PYROMETERSPlural color responsive Modulating (e.g., flicker beam) In spaced noncontact relationship to specimen By thermally emitted radiation Having emissivity compensating or specified radiating surface Comparison with radiation reference standard Optical system structure (e.g., lens) Ambient temperature compensated (e.g., dummy sensor) Infrared responsive | |