Damping support structure
June 1, 2009. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 2947529 3889936 Torque rejection soft mounted platform Drive for dynamic mechanical system Controlled motion apparatus Vibration control system System for wide bandwidth damping Anti-vibration system Non contacting electro-pneumatic servo for vibration isolation Wideband electromagnetic damping of vibrating structures InventorsAssigneeApplicationNo. 360238 filed on 06/01/1989US Classes:267/136, RESILIENT SHOCK OR VIBRATION ABSORBER188/378, INERTIA OF DAMPING MASS DISSIPATES MOTION (E.G., VIBRATION DAMPER)248/550WITH CONDITION RESPONSIVE CONTROL MEANSExaminersPrimary: Butler, Douglas C.Attorney, Agent or FirmForeign Patent References
International ClassF16F 007/10Foreign Application Priority Data1988-06-06 JPAbstractA damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.Field of SearchINERTIA OF DAMPING MASS DISSIPATES MOTION (E.G., VIBRATION DAMPER)Resiliently supported damping mass Supported by mechanical spring WITH CONDITION RESPONSIVE CONTROL MEANS RESILIENT SHOCK OR VIBRATION ABSORBER Tool movement dampening Circuitry Electromagnetically vibrated Table, platform, or other support Having fluid bearing or fluid pressure actuated Having spring support | |
