Patent ReferencesMethod & apparatus for cooling electrodeless lamps Method and apparatus for performing deep UV photolithography Lamp having segmented reflector Microwave powered electrodeless light source utilizing de-coupled modes Optical system for uniform illumination of a plane surface Deep UV lamp bulb with improved fill Patent #: 4859906 InventorsAssigneeApplicationNo. 211543 filed on 06/24/1988US Classes:315/344, Electromagnetic influenced discharge device315/39, Discharge device load with distributed parameter-type transmission line (e.g., wave-guide, coaxial cable)315/248Induction-type discharge device loadExaminersPrimary: LaRoche, Eugene R.Assistant: Neyzari, Ali Attorney, Agent or FirmInternational ClassH05B 041/24AbstractAn electrodeless lamp which couples strong microwave fields to a very small bulb of diameter about 1/2' or smaller. The lamp is operated in a mode which is independent of the height of the cavity and which provides electric field lines parallel to such height. The height of the cavity is substantially reduced as compared with prior lamps to provide strong coupling of the electric field to the bulb.Field of SearchInduction-type discharge device loadDischarge device load with distributed parameter-type transmission line (e.g., wave-guide, coaxial cable) Electromagnetic influenced discharge device load Electromagnetic influenced discharge device Plural load device systems Plasma generating With magnetic field DISCHARGE DEVICE LOAD Irradiation of semiconductor devices | |