Patent References 3566215 3874936 Silicon on sapphire oriented for maximum mobility Patent #: 3969753 InventorsAssigneeApplicationNo. 463608 filed on 02/03/1983US Classes:257/64, Non-single crystal, or recrystallized, material with specified crystal structure (e.g., specified crystal size or orientation)257/E21.318, Of silicon body, e.g., for gettering (EPO)257/E21.324, Thermal treatment for modifying the properties of semiconductor body, e.g., annealing, sintering (EPO)257/E21.347, Using electromagnetic radiation, e.g., laser radiation (EPO)257/E29.004, With specified crystalline planes or axis (EPO)257/E29.056, With variation of composition of channel (EPO)257/E29.086, Further characterized by doping material (EPO)257/E29.107, Imperfections within semiconductor body (EPO)257/E29.287SOS transistor (EPO)ExaminersPrimary: James, Andrew J.Assistant: Prenty, Mark V. Attorney, Agent or FirmInternational ClassH01L 029/78Foreign Application Priority Data1982-02-03 JPAbstractA semiconductor device has an active layer in which a semiconductor element is formed by employing a silicon single crystal as a substrate. The present invention causes a tensile strain to remain in the active layer, thereby to improve the carrier mobility.Other References
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