Method for fabricating flyleads for video disc styli
Fabrication of video disc flyleads
Method for preparing stylus lapping discs
Microcasting of microminiature tips Patent #: 4916002
ApplicationNo. 368580 filed on 06/20/1989
US Classes:430/320, Making named article216/2, ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLE HAVING A NONELECTRICAL FUNCTION216/66, Using ion beam, ultraviolet, or visible light216/67, Using plasma216/79, Etching silicon containing substrate369/170, Stylus holder or shield369/173, Stylus430/323, Including etching substrate430/324Including material deposition
ExaminersPrimary: Dees, Jose G.
Attorney, Agent or Firm
International ClassG03C 005/00
AbstractA cantilever stylus with an integrally formed conical tip is provided for atomic force microscopy AFM. The method for forming a stylus includes forming a circular masking pattern on the surface of a silicon substrate and anisotropically etching the silicon to form a post under the masking pattern. The post is then isotropically etched to produce a conical silicon tip mold. In one embodiment of the invention the silicon substrate and the conical silicon tip mold are thermally oxidized to form a cantilever stylus having including a cantilever arm with a conical tip fixed to its free end. In another embodiment of the invention the silicon substrate and the conical silicon tip mold are coated with a thin film of a dielectric material to form a cantilever stylus with a conical tip. In this embodiment the backside of the stylus is coated with a conductive material and a strong electric field is applied to the tip to cause electromigration of the conductive material to the point of the tip.