Vibration cancellation system for scanning electron microscopes
Patent 4948971 Issued on August 14, 1990. Estimated Expiration Date: 
November 14, 2008. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
November 14, 2008. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesInventorsAssigneeApplicationNo. 270369 filed on 11/14/1988US Classes:250/310, Electron probe type250/306, INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES250/307, Methods250/311Electron microscope typeExaminersPrimary: Berman, Jack I.Foreign Patent References
International ClassH01J 037/28AbstractA method and system to reduce the sensitivity of instruments such as scanning electron microscopes to vibrations and similar disturbances. In the preferred embodiment, the system includes at least two velocity sensors connected to the specimen stage of the microscope to detect vibrations in two independent directions, integrators to integrate output signals from the velocity sensors to indicate displacement of the specimen stage in the two directions, and a beam steering device that receives signals from the integrators and adjusts the normal scanning pattern of the electron beam of the microscope to reduce the effect of vibrations.Other References
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