Production of resistor from insulating material by local heating
Method and apparatus for forming low resistance lateral links in a semiconductor device
Laser make-link programming of semiconductor devices
Method of forming conductor path Patent #: 4694138
ApplicationNo. 298131 filed on 01/18/1989
US Classes:219/121.65, Melting219/121.6, Using laser257/E23.147, Comprising antifuses, i.e., connections having their state changed from nonconductive to conductive (EPO)257/E23.148Change of state resulting from use of external beam, e.g., laser beam or ion beam (EPO)
ExaminersPrimary: Albritton, C. L.
Attorney, Agent or Firm
International ClassB23K 076/00
Foreign Application Priority Data1988-01-20 JP
AbstractA trimming element comprises (a) a medium layer, (b) a pair of electrodes connected to the medium layer, and (c) an alloy layer, which is formed of metal of the electrodes and material of the medium layer and is created in the medium layer, for substantially short-circuiting the electrodes to each other. The alloy layer is obtained by applying a laser beam to the medium layer to heat a portion between the electrodes. The metal layer for substantially short-circuiting the electrodes is thus formed.