Microwave plasma torch, device comprising such a torch and process for manufacturing powder by the use thereof

Patent 4924061 Issued on May 8, 1990. Estimated Expiration Date:

June 10, 2008. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Abstract Claims Description Full Text

Patent References

Activated gas reaction apparatus & method
Patent #: 4065369
Issued on: 12/27/1977
Inventor: Ogawa , et al.

Plasma etching apparatus
Patent #: 4101411
Issued on: 07/18/1978
Inventor: Suzuki , et al.

Activated gas generator
Patent #: 4207452
Issued on: 06/10/1980
Inventor: Arai

Process for treatment of pourable materials with microwaves
Patent #: 4208806
Issued on: 06/24/1980
Inventor: Manser , et al.

Apparatus for treating powdery materials utilizing microwave plasma
Patent #: 4423303
Issued on: 12/27/1983
Inventor: Hirose , et al.

Frequency stabilized microwave power system and method Patent #: 4711983
Issued on: 12/08/1987
Inventor: Gerling

Inventors

Assignee

L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des

Application

No. 204866 filed on 06/10/1988

US Classes:

219/121.52, Electrode structure219/121.48, Plasma torch structure219/121.51, Gas supply system219/695, Input power port arrangement315/111.21Plasma generating

Examiners

Primary: Paschall, Mark H.

Attorney, Agent or Firm

Young & Thompson

Foreign Patent References

2336050 DE. 02/13/1975
3134501 DE. 08/13/1983

International Class

B23K 009/00

Foreign Application Priority Data

1987-06-10 FR

Abstract

The microwave torch comprises at least one gas supply conduit (1, 2); a resonant cavity (3) forming around the conduit a sleeve open adjacent to the outlet of the conduit and including a lateral opening (4); a transition coaxial structure perpendicular to the sleeve comprising, on one hand, an outer tube (5) connected to the lateral opening (4) of the sleeve and, on the other hand, an inner element (6) having one end (20) in contact with the conduit and an opposite end which is in contact with the outer surface of a wave guide (8) and carries a transition member (7) disposed in the wave guide; said wave guide supplying microwave energy and having a rectangular section and perpendicular to the coaxial structure (5, 6) being provided with an opening (27) where the outer tube (5) of the coaxial structure is connected; shielding gas supply means in the wave guide and/or the coaxial structure and/or the sleeve; optionally tuning means; and optionally plasma igniting means.