Device for pressure measurement using a resistor strain gauge
High pressure capacitive transducer
Differential pressure transducer Patent #: 4670733
ApplicationNo. 294412 filed on 01/09/1989
US Classes:73/727, Piezoresistive73/756, Mounting and connection338/4, Fluid- or gas pressure-actuated338/42Diaphragm
ExaminersPrimary: Woodiel, Donald O.
Attorney, Agent or Firm
Foreign Patent References
International ClassesG01L 007/08
Foreign Application Priority Data1988-01-16 JP
AbstractA pressure sensor including a cylindrical metallic housing having an open end having an opening, a ceramic pressure sensing element having a ceramic diaphragm and fixedly accommodated within an open end portion of the metallic housing, and a strain detector associated with the ceramic diaphragm. The ceramic diaphragm is exposed at one of opposite major surfaces thereof to an external space through the opening of the metallic housing and is deformable in response to a pressure of a measurement fluid in the external space. An electrical output of the strain detector varies with an amount of deformation of the ceramic diaphragm, thereby representing the pressure of the fluid. The sensor further includes a metallic sealing member which is fluid-tightly bonded to a peripheral portion of the ceramic pressure sensing element with a bonding material, and which is fluid-tightly welded to the open end portion of the cylindrical metallic housing, so that the pressure sensing element is fluid-tightly secured to the metallic housing through the metallic sealing member, whereby an interior of the metallic housing is sealed with respect the external space.