U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Apparatus for measuring an adhesion force of a thin film

Patent 4856326 Issued on August 15, 1989. Estimated Expiration Date: Icon_subject July 26, 2008. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Method for nondestructive testing of coating adhesion Patent #: 4606225
Issued on: 08/19/1986
Inventor: Thomason ,   et al.

Inventor

Application

No. 07/224306 filed on 07/26/1988

US Classes:

73/150A, Bond strength73/799, Specimen cracking or crack propagation73/801Acoustic emission

Examiners

Primary: Myracle, Jerry W.

Attorney, Agent or Firm

International Classes

G01N 19/04 (20060101)
G01N 19/00 (20060101)
G01N 3/00 (20060101)
G01N 3/06 (20060101)

Foreign Application Priority Data

1987-07-27 JP

Abstract

An apparatus for measuring the adhesion force of a thin film deposited on a substrate of a specimen. The apparatus comprises an inclining mechanism for mounting a sample dish with a specimen inclined by a predetermined angle with respect to the sample dish, an indentor disposed above the specimen for deforming the specimen by indentation, a driver for driving the indentor perpendicular to the sample dish, a load transducer for measuring a load applied to the specimen by the indentor, a sensor for sensing propagation of a crack produced in the specimen by the load, a displacement gage interlocked with the driver for measuring a penetration depth of the indentor, and a measuring mechanism for measuring the adhesion force of the thin film to the substrate.

Other References

  • "Adhesion of TiC and Ti(C,N) Coatings on Steel", Steinmann, P. A., Hintermann, H. E., J. Vac. Sci. Technol. A 3(6), Nov./Dec. 1985
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