U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Method for making folded extended window field effect transistor

Patent 4844776 Issued on July 4, 1989. Estimated Expiration Date: Icon_subject December 4, 2007. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

Method of fabricating MOS field effect transistors
Patent #: 4324038
Issued on: 04/13/1982
Inventor: Chang ,   et al.

Fabrication of FETs Patent #: 4453306
Issued on: 06/12/1984
Inventor: Lynch ,   et al.

Inventors

Application

No. 07/128834 filed on 12/04/1987

US Classes:

438/303, Utilizing gate sidewall structure257/E21.59, Local interconnects; local pads (EPO)438/305, Plural doping steps438/586Combined with formation of ohmic contact to semiconductor region

Examiners

Primary: Powell, William A.

Attorney, Agent or Firm

International Classes

H01L 21/768 (20060101)
H01L 21/70 (20060101)
H01L 21/336 (20060101)
H01L 21/02 (20060101)

Abstract

A gate electrode having an insulating top layer as well as insulating sidewall spacers permits the source and drain regions to be electrically contacted through windows directly above the source and drain regions formed in a window pad layer. The window pad layer may also be used as a sublevel interconnect.

Other References

  • Japanese Journal of Applied Physics, 21, pp. 34-38, Symposium on VLSI Technology, Sep. 1-3, 1982
  • IBM Technical Disclosure Bulletin, 26, pp. 4303-4307, Jan., 1984
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