Patent ReferencesMethod of fabricating MOS field effect transistors Fabrication of FETs Patent #: 4453306 InventorsApplicationNo. 07/128834 filed on 12/04/1987US Classes:438/303, Utilizing gate sidewall structure257/E21.59, Local interconnects; local pads (EPO)438/305, Plural doping steps438/586Combined with formation of ohmic contact to semiconductor regionExaminersPrimary: Powell, William A.Attorney, Agent or FirmInternational ClassesH01L 21/768 (20060101)H01L 21/70 (20060101) H01L 21/336 (20060101) H01L 21/02 (20060101) AbstractA gate electrode having an insulating top layer as well as insulating sidewall spacers permits the source and drain regions to be electrically contacted through windows directly above the source and drain regions formed in a window pad layer. The window pad layer may also be used as a sublevel interconnect.Other References
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