Laser annealed dielectric for dual dielectric capacitor Patent #: 4437139
ApplicationNo. 07/135482 filed on 12/21/1987
US Classes:438/396, Stacked capacitor257/532, Including capacitor component427/582Photoinitiated chemical vapor deposition (i.e., photo CVD)
ExaminersPrimary: Hearn, Brian E.
Assistant: Bunch, William
Attorney, Agent or Firm
International ClassesH01G 4/08 (20060101)
H01G 4/30 (20060101)
Foreign Application Priority Data1984-11-23 DE
AbstractThin-film capacitors are produced with laser chemical vapor deposition technology on a substrate, which is preferably the substrate of an integrated circuit, by forming alternating layers of electrodes and dielectric.