Patent ReferencesInspection apparatus Linear flaw detector Process and apparatus for the detection of flaws in transparent sheets of glass Surface condition judging apparatus Apparatus and method for detecting defects and dust on a patterned surface Patent #: 4598997 InventorsAssigneeApplicationNo. 07/047889 filed on 05/08/1987US Classes:250/559.45, With defect discrimination circuitry356/237.2, Surface condition356/430For flaws or imperfectionsExaminersPrimary: Westin, Edward P.Assistant: Shami, Khaled Attorney, Agent or FirmInternational ClassesG01N 21/88 (20060101)G01N 21/95 (20060101) AbstractAn apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw and producing signals representative thereof; normalizing the near-specular signal with respect to the far-specular signal to indicate a pit; and discriminating the near-specular components of the normalized signal representative of surface pits. | |