Industrial robot system
Apparatus for loading objects
Robot and control system
Automated tool manipulating structure with X-Y movement including a belt and pulley drive arrangement
ApplicationNo. 07/063956 filed on 06/19/1987
US Classes:414/661, Push-pull device198/346.2, Means to transfer a load back and forth between the mainline conveyor and the work station198/468.6, Engaging element moves load vertically and horizontally414/416.03, Horizontal movement of receptacle contents414/590, Additional movement is rotational414/744.1, HORIZONTALLY SWINGING LOAD SUPPORT414/936, Including wafer orienting means414/937, Including means for charging or discharging wafer cassette414/938Wafers positioned vertically within cassette
ExaminersPrimary: Spar, Robert J.
Assistant: Bucci, David A.
Attorney, Agent or Firm
International ClassH01L 21/67 (20060101)
Foreign Application Priority Data1986-10-11 JP
AbstractThere is disclosed a carrier system for carrying a silicon wafer or a cassette accommodating the wafers to arbitrary positions by loading an arm with them. This carrier system is arranged such that: a screw shaft is perpendicularly provided in a rotationally drivable manner between an upper plate and a bottom plate which are vertically connected through a plurality of guide bars to each other; a movable plate is so disposed as to be vertically movable by the rotation of the screw shaft and is guided by the guide bars in a vertically slidable manner between the upper plate and the bottom plate; a cylindrical member is perpendicularly so provided on the movable plate as to be rotationally drivable and penetrate the upper plate and protrude upwards therefrom; a horizontal movement member is fixed to an upper end of the cylindrical member; a carriage provided with the rotary arm is disposed in a horizontally movable manner on the horizontal movement member; a driving wire spanned between pulleys axially supported within the horizontal movement member is secured to the carriage; and the rotary arm including a wafer arm and a cassette arm which are disposed in positions orthogonal to each other is pivotally so supported on the carriage as to vertically rotate through approximately 90°. In this constitution, the carrier system suffices for taking the silicon wafers in and out of the cassette and carrying the cassette itself.