Forceps for semiconductor silicon wafer
Patent 4767142 Issued on August 30, 1988. Estimated Expiration Date: 
March 25, 2007. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
March 25, 2007. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 954927 982661 1302028 1337427 1743212 3335727 InventorsApplicationNo. 07/030061 filed on 03/25/1987US Classes:294/64.1, VACUUM285/261, BALL AND SOCKET285/390, SCREW285/397, INTERNAL SLEEVE403/299, THREAD ADAPTOR403/90, Ball and socket414/941Includes means for gripping waferExaminersPrimary: Cherry, Johnny D.Attorney, Agent or FirmInternational ClassesB25B 11/00 (20060101)H01L 21/67 (20060101) H01L 21/683 (20060101) Foreign Application Priority Data1986-08-01 JPAbstractA vacuum-forceps is disclosed. A valve chamber is provided between a first suction passage communicating with an adsorptive member and a second suction passage connected through a suction tube to a vacuum source. A valve member linked to an operating push button is accomodated in the valve chamber. The adsorptive member is rotatable and swayable relative to a forceps body with the aid of a spherical member. A suction tube is connected through a double-coupling to the forceps body. A bypass is provided between the valve chamber and the first suction passage. A semiconductor silicon wafer is adsorbed on an adsorptive plate provided at the tip end of the adsorptive member by actuating the push button and is then moved to a desired position.Other References
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