Patent References 954927 982661 1302028 1337427 1743212 3335727 InventorsApplicationNo. 07/030061 filed on 03/25/1987US Classes:294/64.1, VACUUM285/261, BALL AND SOCKET285/390, SCREW285/397, INTERNAL SLEEVE403/299, THREAD ADAPTOR403/90, Ball and socket414/941Includes means for gripping waferExaminersPrimary: Cherry, Johnny D.Attorney, Agent or FirmInternational ClassesB25B 11/00 (20060101)H01L 21/67 (20060101) H01L 21/683 (20060101) Foreign Application Priority Data1986-08-01 JPAbstractA vacuum-forceps is disclosed. A valve chamber is provided between a first suction passage communicating with an adsorptive member and a second suction passage connected through a suction tube to a vacuum source. A valve member linked to an operating push button is accomodated in the valve chamber. The adsorptive member is rotatable and swayable relative to a forceps body with the aid of a spherical member. A suction tube is connected through a double-coupling to the forceps body. A bypass is provided between the valve chamber and the first suction passage. A semiconductor silicon wafer is adsorbed on an adsorptive plate provided at the tip end of the adsorptive member by actuating the push button and is then moved to a desired position.Other References
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