Automatic accurate alignment system
July 12, 2005. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3450480 3895854 System for recognition of shape patterns Digital video correlator System for detecting the position of an object Solid-state video camera having a video signal processor Electron probe microanalyzer comprising an observation system having double magnification Method of aligning a mask and a wafer for manufacturing semiconductor circuit elements Inclinable microscope body Method and apparatus for automatic wafer inspection InventorAssigneeApplicationNo. 06/732219 filed on 05/09/1985US Classes:382/148, At plural magnifications or resolutions348/95, Alignment or positioning382/151Alignment, registration, or position determinationExaminersPrimary: Boudreau, Leo H.Assistant: Skinner, A. Anne Attorney, Agent or FirmInternational ClassesB23Q 15/20 (20060101)G06T 7/00 (20060101) G06K 9/46 (20060101) B23Q 15/22 (20060101) Foreign Application Priority Data1984-05-21 JPAbstractAn automatic accurate alignment system for positioning an object to be worked which has a certain pattern on its surface at a required position. The system performs primary positioning of the object to be worked on the basis of low magnification pattern matching with respect to at least a part of the image of the object magnified at a relatively low magnification. Thereafter, the system performs secondary positioning of the object to be worked on the basis of high magnification pattern matching with respect to at least a part of the image of the object magnified at a relatively high magnification. | |
