Reticle transporter
Patent 4719705 Issued on January 19, 1988. Estimated Expiration Date: 
June 24, 2006. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
June 24, 2006. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3393648 3476444 3831283 Workpiece positioning table Traversing microtome with air bearings Air bearing body Guide system Patent #: 4643590 InventorsAssigneeApplicationNo. 06/877817 filed on 06/24/1986US Classes:33/568, Work support adjustment269/21, Vacuum-type holding means269/55, HOLDER MOUNTED FOR MOVEMENT33/613, Collocating384/12Fluid bearingExaminersPrimary: Stearns, Richard R.Attorney, Agent or FirmInternational ClassesG03F 7/20 (20060101)B23Q 1/26 (20060101) B23Q 1/38 (20060101) F16C 29/00 (20060101) F16C 29/02 (20060101) G01B 5/00 (20060101) AbstractThe described invention is a precisely adjustable transporter for moving a reticle past an optical slit as a step in the production of semiconductor wafers. The reticle stage rides along a pair of optically flat planar, intersecting, bearing surfaces supported by air bearings on each bearing surface. Pressurized air and vacuum may be simultaneously employed to effect substantially friction-free motion while preventing displacement from the bearing surfaces. Axial adjustments on each air bearing permit precise adjustment of the reticle stage and reticle. | |
