Patent References 3829219 3921080 3923400 Sensor system for detecting wavefront distortion in a return beam of light Combined shearing interferometer and Hartmann wavefront sensor Patent #: 4518854 InventorAssigneeApplicationNo. 06/751633 filed on 07/03/1985US Classes:356/521, Having wavefront division (by diffraction)250/201.9, Light beam wavefront phase adaptation356/520, Having shearing702/1, MEASUREMENT SYSTEM IN A SPECIFIC ENVIRONMENT702/127MEASUREMENT SYSTEMExaminersPrimary: Willis, Davis L.Assistant: Koren, Matthew W. Attorney, Agent or FirmInternational ClassesG01J 9/02 (20060101)G01J 9/00 (20060101) AbstractA wavefront of light is focused upon a first shearing interferometer having a relatively large shear and small dynamic range and a relatively minor portion of the light is focused upon a second shearing interferometer having a relatively small shear but large dynamic range. Owing to the limited dynamic range of the first shearing interferometer a plurality of a plurality of virtual candidate measurements are manifest which are compared with the temporally and/or spatially averaged values of each measurement produced by the second shearing interferometer and the closest match is employed to obtain a highly accurate unambiguous reading of the wavefront slope measurements. | |