InventorsApplicationNo. 06/883011 filed on 07/07/1986US Classes:257/745, Contact for III-V material257/743, For compound semiconductor material257/751, At least one layer forms a diffusion barrier257/763, At least one layer of molybdenum, titanium, or tungsten257/E23.019, Consisting of layered constructions comprising conductive layers and insulating layers, e.g., planar contacts (EPO)257/E23.16, Additional layers associated with aluminum layers, e.g., adhesion, barrier, cladding layers (EPO)257/E29.144On Group III-V material (EPO)ExaminersPrimary: Edlow, Martin H.Assistant: Clark, S. V. Attorney, Agent or FirmInternational ClassesH01L 23/48 (20060101)H01L 29/40 (20060101) H01L 23/52 (20060101) H01L 23/485 (20060101) H01L 29/45 (20060101) H01L 23/532 (20060101) Foreign Application Priority Data1983-05-31 JPAbstractA GaAs semiconductor device, includes a p-type GaAs substrate, an n-type region formed in the surface area of the substrate, an ohmic contact electrode formed in ohmic contact with the n+ -type region and having a layer of alloy of gold, and an interconnection electrode formed on the ohmic contact electrode and including an upper layer of aluminum and a lower layer of a metal which prevents gold from passing through it. The interconnection electrode is formed such that it covers the top and side surfaces of the ohmic contact electrode.Other References
| |