Patent ReferencesMethod and apparatus for a Fabry-Perot multiple beam fringe sensor Fiber optical sensor device for measuring a physical parameter Patent #: 4408123 InventorApplicationNo. 06/848930 filed on 04/07/1986US Classes:73/705, Photoelectric250/231.19, Pressure-responsive light valves356/480, Resonant cavity356/519Having partially reflecting plates in series (e.g., Fabry-Perot type)ExaminersPrimary: Woodiel, Donald O.Attorney, Agent or FirmInternational ClassesG01L 9/00 (20060101)G02B 26/00 (20060101) Foreign Application Priority Data1985-04-11 JPAbstractA pressure sensitive element having a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system, and a diaphragm laminated on the light reflecting thin films, wherein an optical path difference is formed in accordance with an interval of an air gap located between the pairs of light reflecting thin films, while the interval of the air gap changes by the deformation of the diaphragm. | |