Patent ReferencesMetal-to-moat contacts in N-channel silicon gate integrated circuits using discrete second-level polycrystalline silicon Semiconductor memory device having stacked polycrystalline silicon layers Patent #: 4481524 InventorsAssigneeApplicationNo. 06/699051 filed on 02/07/1985US Classes:365/154, Flip-flop (electrical)257/390, Matrix or array of field effect transistors (e.g., array of FETs only some of which are completed, or structure for mask programmed read-only memory (ROM))257/659, WITH SHIELDING (E.G., ELECTRICAL OR MAGNETIC SHIELDING, OR FROM ELECTROMAGNETIC RADIATION OR CHARGED PARTICLES)257/69, Field effect transistor in single crystal material, complementary to that in non-single crystal, or recrystallized, material (e.g., CMOS)257/903, FET CONFIGURATION ADAPTED FOR USE AS STATIC MEMORY CELL257/E27.098, Static random access memory, SRAM, structure (EPO)257/E27.099, Load element being a MOSFET transistor (EPO)257/E27.101Load element being a resistor (EPO)ExaminersPrimary: Larkins, William D.Attorney, Agent or FirmInternational ClassH01L 27/11 (20060101)AbstractA memory array of four-IGFET-transistor cells arranged in rows and columns. The array uses two patterned metal layers and two patterned poly-silicon layers. For each column there is a pair of metal differential bit lines, formed on a first patterned metal layer. For each row there is a pair of split equipotential poly-silicon word lines and a parallel metal word line with connections to the split poly word lines at defined intervals. The parallel metal word line is on a second patterned metal layer distinct from the metal layer used for the bit lines. A grounded poly-silicon plate overlies the capacitive memory nodes of said array. The grounded poly-silicon plate is on a second patterned poly-silicon layer distinct from the poly-silicon layer used for the split word lines. The poly-silicon plate is connected to the circuit ground at defined intervals. Also, the poly-silicon plate provides alpha particle protection to the array and helps decouple the bit lines from the capacitive nodes of the array. | |