Micromechanical display logic and array
Spatial light modulator and method
Linear spatial light modulator and printer Patent #: 4596992
ApplicationNo. 06/792947 filed on 10/30/1985
US Classes:359/223By moving a reflective element
ExaminersPrimary: Corbin, John K.
Assistant: Lemmo, Vincent J.
Attorney, Agent or Firm
International ClassesB81B 3/00 (20060101)
G03F 7/20 (20060101)
G02B 6/12 (20060101)
G02B 26/02 (20060101)
G02B 26/08 (20060101)
AbstractAn electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a spacer made of photoresist which in turn is on a semiconductor substrate. The substrate contains addressing circuitry in a preferred embodiment.