U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

System for measuring and detecting printed circuit wiring defects

Patent 4650333 Issued on March 17, 1987. Estimated Expiration Date: Icon_subject April 12, 2004. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

3669540

3699304

3712466

3713739

3834819

3844799

Surface profile measuring device and method
Patent #: 4017188
Issued on: 04/12/1977
Inventor: Sawatari

Method of and video system for identifying different light-reflective surface areas on articles
Patent #: 4028728
Issued on: 06/07/1977
Inventor: Sharp

Electroless copper plating process with dissolved oxygen maintained in bath
Patent #: 4152467
Issued on: 05/01/1979
Inventor: Alpaugh ,   et al.

Laser measuring system for inspection
Patent #: 4158507
Issued on: 06/19/1979
Inventor: Himmel

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Inventors

Application

No. 06/599422 filed on 04/12/1984

US Classes:

356/606, Line of light projected348/126, Of electronic circuit chip or board356/237.5, On patterned or topographical surface (e.g., wafer, mask, circuit board)356/631By triangulation

Examiners

Primary: Evans, F. L.
Assistant: Harringa, Joel L.

Attorney, Agent or Firm

International Classes

G01B 11/25 (20060101)
G01B 11/24 (20060101)
G01N 21/956 (20060101)
G01N 21/88 (20060101)
G01R 31/309 (20060101)
G01R 31/28 (20060101)

Abstract

A non-contact system for detecting printed circuit wiring defects and for measuring circuit feature height relative to a substrate. The system has an energy source for illuminating the substrate and circuit features and a scanner for both instantaneously receiving energy reflected from the substrate and circuit features and for generating a signal in response to the reflected energy, which signal is adapted to vary with the intensity of the reflected energy. An analyzer is connected to the scanner for correlating the generated signal to a measurement representative of the height of the circuit features relative to the substrate. Variations and non-uniformity of the substrate surface due to bending, warpage or other causes can be accounted for so as to provide an accurate measurement of the height of a circuit feature relative to the substrate surface on which it is mounted.

Other References

  • Sterling, Proc. Soc. Photo-Opt. Instrum. Eng., vol. 281, Techniques and Applications of Image Understanding, p. 182, 1981
  • Hauge, IBM Technical Disclosure Bulletin, vol. 21, No. 2, Jul. 1978, p. 884
  • Kapur, IBM Technical Disclosure Bulletin, vol. 21, No. 11, Apr. 1979, p. 4429
  • "Noncontact Test System", S. H. Campbell et al, IBM Technical Disclosure Bulletin, vol. 14, No. 12, May 1972
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