Aligning method
Patent 4643579 Issued on February 17, 1987. Estimated Expiration Date: 
November 19, 2004. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
November 19, 2004. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3712740 3843916 Alignment device System for detecting a signal for aligning two bodies and signal _processing method Alignment mark detecting apparatus and method Patent #: 4545684 InventorsAssigneeApplicationNo. 06/672784 filed on 11/19/1984US Classes:356/401, With registration indicia (e.g., scale)348/95Alignment or positioningExaminersPrimary: Evans, F. L.Assistant: Harringa, Joel L. Attorney, Agent or FirmInternational ClassesG03F 9/00 (20060101)G02F 1/13 (20060101) G02F 1/1333 (20060101) Foreign Application Priority Data1983-11-21 JPAbstractA method of aligning a first object and a second object comprises the steps of detecting, in at least two directions of detection in each examination region of which is included the superposed portion of a first area type mark formed on the first object and a second area type mark formed on the second object when the two marks are seen from a predetermined direction, the lengths of the superposed portion and the non-superposed portion of the marks in the first and second objects or the images thereof, and comparing the detected lengths and operating a positional deviation.Other References
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