Particle position correlator and correlation method for a surface scanner
Patent 4641967 Issued on February 10, 1987. Estimated Expiration Date: 
October 11, 2005. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
October 11, 2005. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesApparatus for inspecting a circuit pattern drawn on a photomask used in manufacturing large scale integrated circuits Patent #: 4559603 InventorAssigneeApplicationNo. 06/786620 filed on 10/11/1985US Classes:356/237.3, Detection of object or particle on surface716/21Pattern exposureExaminersPrimary: LaRoche, Eugene R.Assistant: Pascal, Robert Attorney, Agent or FirmInternational ClassesG01N 21/88 (20060101)G01N 21/94 (20060101) AbstractA method and apparatus for particle detection and position correlation that fuses separate detections of the same particle on adjacent scan lines into one. A first scan line on a surface is scanned with a laser beam and the scattered light detected. The detection generates address and amplitude data for each particle which is stored. The second line scanned also generates data which is stored in a buffer. Particle data between scan lines is compared. Data for new particles is stored, data for previous particles no longer detected being sent to computer storage, and data for the same particle being compared and only the one with larger amplitude being kept. The results in computer storage may be displayed as a wafer with those pixels lit which have particles.Other References
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