Two-dimensional imaging with line arrays
May 7, 2004. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3813169 Zone plate alignment marks Interferometer Apparatus for detecting an output image of an optical correlation Method and apparatus for aligning mask and wafer members Method and apparatus for positioning a tapered body Optical fringe analysis Wafer tilt compensation in zone plate alignment system Positioning method Patent #: 4531060 InventorAssigneeApplicationNo. 06/607956 filed on 05/07/1984US Classes:356/401With registration indicia (e.g., scale)ExaminersPrimary: Willis, Davis L.Attorney, Agent or FirmInternational ClassG03F 9/00 (20060101)AbstractOne or two linear arrays of photodetectors are combined with optical elements to form an arrangement capable of determining the X-Y location of a focused laser beam or other light spot. The resulting arrangement is characterized by low cost and by excellent resolution, stability and linearity. Moreover, the arrangement provides output data that can be easily and quickly processed. The combination is adapted, for example, for use with zone plates in aligning masks and wafers in semiconductor fabrication. | |
