Patent ReferencesDevice for measuring the flow rate of a fluid and air flow sensor system in an internal combustion engine utilizing such a device Surface acoustic wave sensors Patent #: 4535631 InventorsAssigneeApplicationNo. 06/687715 filed on 12/31/1984US Classes:73/703, Ultrasonic29/25.35, PIEZOELECTRIC DEVICE MAKING310/313B, Interdigitated electrodes310/338, Force or pressure measuring type73/708, With pressure and/or temperature compensation73/729.2CapsuleExaminersPrimary: Woodiel, Donald O.Attorney, Agent or FirmInternational ClassG01L 9/00 (20060101)AbstractDisclosed is an externally loaded pressure sensor using a pair of SAW devices formed on the wall of an interior cavity. The difference frequency of these devices is used as a temperature-compensated measure of hydrostatic pressure on the sensor exterior. The cavity wall immediately adjacent the long sides of at least one of the SAW devices is rounded, to improve pressure sensitivity without unacceptable increase in stresses or other adverse effects. | |