Solid state multiprobe testing apparatus
Patent 4585991 Issued on April 29, 1986. Estimated Expiration Date: 
March 13, 2005. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
March 13, 2005. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent References 3436605 3453545 3581151 3781596 Programmable interface contactor structure Integrated circuit chip test and assembly package Patent #: 3984620 InventorsAssigneeApplicationNo. 06/710959 filed on 03/13/1985US Classes:324/757, Probe contact enhancement216/2, ETCHING OF SEMICONDUCTOR MATERIAL TO PRODUCE AN ARTICLE HAVING A NONELECTRICAL FUNCTION438/613Bump electrodeExaminersPrimary: Levy, Stuart S.Assistant: Baker, Stephen M. Attorney, Agent or FirmInternational ClassesG01R 1/073 (20060101)G01R 31/28 (20060101) AbstractA high density multiprobe including a multiprobe on a semiconductor substrate with contact pads selectively positioned in relation to the contacts of a device to be tested. Each of the selectively positioned contacts on the multiprobe semiconductor substrate include an elevated conductive surface that makes physical and electrical contact with the contacts of the device to be tested. In addition, the elevated conductive surfaces on the multiprobe are conductively connected to interface terminals on the semiconductor substrate to allow test signals to be input and output from the multiprobe device during testing. The multiprobe semiconductor substrate is also capable of containing onboard circuitry including buffers and logic circuitry for processing the test signals to be sent to and received from the device under test. A multiprobe testing device is also disclosed that includes the multiprobe semiconductor substrate with elevated contacts to allow for the testing of a semiconductor device.Other References
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