U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Horizontal position detecting device

Patent 4558949 Issued on December 17, 1985. Estimated Expiration Date: Icon_subject December 17, 2002. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.

Patent References

3541338

3645623

3880524

Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed
Patent #: 4356392
Issued on: 10/26/1982
Inventor: Wittekoek ,   et al.

Optical imaging apparatus Patent #: 4477185
Issued on: 10/16/1984
Inventor: Berger ,   et al.

Inventors

Assignee

Application

No. 06/419514 filed on 09/17/1982

US Classes:

356/139.07, With photodetection of reflected beam angle with respect to a unidirectional source beam250/559.38, Determining range from detector356/152.2, With reflection of a unidirectional source beam from a planar or nonretroreflective surface356/3.08, With at least one paired set of staring photodetectors356/400, With light detector (e.g., photocell)356/614POSITION OR DISPLACEMENT

Examiners

Primary: Buczinski, S. C.

Attorney, Agent or Firm

International Class

G03F 9/00 (20060101)

Foreign Application Priority Data

1981-12-26 JP

Abstract

Disclosed is a horizontal position detecting device for maintaining the surface of a body to be inspected vertically to the optical axis of a main objective lens. The device includes an illumination optical system and a condenser lens system. The illumination optical system supplies parallel light rays to the surface of the body from the direction oblique to the optical axis of the objective lens. The condenser lens system condenses the light rays supplied by the illumination optical system and reflected by the surface of the body. The optical axes of the illumination optical system and the condenser lens system are arranged substantially symmetrically with respect to the axis of the objective lens.

Other References

  • K E. Rhodes, IBM Tech. Discl. Bul., vol. 21, #10, Mar. 1979, p. 4121
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