Abstract

There is provided a method of detecting any positional deviation of a workpiece from a reference position with the aid of an image sensor. First, a sample workpiece is put at the predetermined position, and is detected by the image sensor to provide reference image information. Likewise, a workpiece under inspection is detected by the image sensor to provide workpiece image information. The reference information is subjected to a parallel transformation and/or rotation and is compared with the workpiece image which remains in the original state, to detect the correlation degree between the two sets of information. The detection of the correlation degree is repeated for each incremental parallel transformation and/or rotation of the reference information. The maximum correlation degree is selected from among the accumulated correlation degrees, whereby the positional deviation of the workpiece, if any, from the reference position is represented by the amount and the direction of the parallel transformation and/or rotation which give the maximum correlation degree.