Solid state pressure transducer of the leaf spring type and batch method of making same
ApplicationNo. 06/487731 filed on 04/22/1983
US Classes:73/765, Compensation (e.g., linearization)73/514.16, Specific type of electric sensor or specific type of magnetic sensor73/514.33, Resistive sensor73/766, Temperature73/862.623, Temperature73/862.628Including a specific type of electrical circuit
ExaminersPrimary: Ciarlante, Anthony V.
Attorney, Agent or Firm
International ClassesG01L 1/22 (20060101)
G01P 1/00 (20060101)
G01P 15/08 (20060101)
G01P 15/12 (20060101)
G01L 1/20 (20060101)
AbstractA miniature, solid state, cantilever beam accelerometer is constructed with an arrangement of strain sensing elements which provides for simpler temperature compensation, dual-axis acceleration measurement, and the capability of correcting for nonlinearity in a strain sensing element. Temperature compensation is facilitated by locating two strain sensing elements on the cantilever beam and two on the main body of the accelerometer and connecting the four elements in a Wheatstone bridge. Instead of a single bridge, two half bridges may be formed to allow for independent adjustment of each side of the Wheatstone bridge. Independent adjustment is also possible by using two full bridges with all strain sensing elements oriented in the same direction. If the elements of one bridge are oriented in an orthogonal direction, the accelerometer is capable of measuring both on-axis and off-axis accelerations. The strain sensing elements may be FET's or resistors and may be deposited upon, or formed integrally with, the accelerometer.