Patent ReferencesLiquid droplet ejecting recording head Liquid jet recording device Monolithic ink jet print head Patent #: 4438191 InventorApplicationNo. 06/497774 filed on 05/25/1983US Classes:347/64ProtectiveExaminersPrimary: Hartary, Joseph W.Attorney, Agent or FirmInternational ClassB41J 2/14 (20060101)AbstractA protective passivation structure is provided for a thermal ink jet printing head which employs a resistive heating element formed of phosphorus-diffused silicon. The passivation structure includes a layer of silicon nitride over the heating element with a layer of silicon carbide over the silicon nitride layer. The nitride exhibits good adhesion to the underlying silicon as well as good thermal conductivity. The carbide has exceptionally good wear and hardness qualities against ink bubble cavitation as well as adhering well to the nitride. | |