Patent ReferencesAbsolute humidity sensors and methods of manufacturing humidity sensors Patent #: 4203087 InventorsAssigneeApplicationNo. 06/340732 filed on 01/19/1982US Classes:427/79, Condenser or capacitor338/35, Humidity361/286, Humidity427/383.1, Metal coating427/383.3, Inorganic base427/383.5Fused oxide-containing base (e.g., ceramic, glass, etc.)ExaminersPrimary: Kittle, John E.Assistant: Seidleck, James J. Attorney, Agent or FirmInternational ClassG01N 27/22 (20060101)Foreign Application Priority Data1981-01-19 FRAbstractThe present invention relates to a process for producing a capacitive hygrometer, as well as to a hygrometer obtained by this process.Onto a conductive layer forming the first electrode is deposited a layer of a material with a dielectric constant varying as a function of the quantity of water absorbed. Onto the said dielectric material layer is then deposited a layer with a thickness exceeding 200 Å of a slightly oxidizable metal, which forms the second electrode. The latter is made permeable to water by heat treatment at a temperature close to the softening temperature of the dielectric.Application to the measurement of the relative humidity of air. | |