Patent References 3138025 3138948 3333470 3538744 Hydrocarbon concentration sensor for use in engine exhaust gas Nitrogen dioxide sensing element and method of sensing the presence of nitrogen dioxide Flow rate meter with temperature dependent resistor Patent #: 4213335 InventorsAssigneeApplicationNo. 06/360414 filed on 03/22/1982US Classes:73/23.4, Detector detail338/25, Ambient temperature374/135By fluid flow within or to sensor (e.g., convection, heat transfer, differential pressure)ExaminersPrimary: Kreitman, Stephen A.Attorney, Agent or FirmInternational ClassesG01N 30/00 (20060101)G01N 30/60 (20060101) G01N 30/66 (20060101) G01N 30/88 (20060101) AbstractThere is described a gas chromatographic assembly formed on a semiconductor wafer by etching techniques. There is also described an improved thermal detector for use therewith.Other References
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