Natural lithographic fabrication of microstructures over large areas
Patent 4407695 Issued on October 4, 1983. Estimated Expiration Date: 
March 29, 2002. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.
March 29, 2002. Estimated Expiration Date is calculated based on simple USPTO term provisions. It does not account for terminal disclaimers, term adjustments, failure to pay maintenance fees, or other factors which might affect the term of a patent.Patent ReferencesStrippable resists Colloidal coating for small three dimensional articles, and particularly for fusion targets having glass shells Patent #: 4315958 InventorsApplicationNo. 06/363019 filed on 03/29/1982US Classes:216/42, Resist material applied in particulate form or spray204/192.34, Ion beam etching (e.g., ion milling, etc.)216/67, Using plasma257/E21.232, Characterized by their composition, e.g., multilayer masks, materials (EPO)427/198, Deforming the base or coating or removing part of the coating427/272, Mask or stencil utilized427/282Mask or stencil utilizedExaminersPrimary: Powell, William A.Attorney, Agent or FirmInternational ClassesB41M 5/24 (20060101)G03F 7/004 (20060101) G03F 7/16 (20060101) H01L 21/02 (20060101) H01L 21/308 (20060101) AbstractLarge area random and mosaic arrays of identical submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles.Other References
Field of SearchSOLID PARTICLES OR FIBERS APPLIEDRotating the base Uniting particles to form continuous coating with nondiscernible particles Synthetic resin particles Localized different areas produced (e.g., printing, etc.) Deforming the base or coating or removing part of the coating Organic coating Resin, rubber, or hardenable oil containing coating Mask or stencil utilized |
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