Device for the light-optical, computer-controlled drawing of masks for semiconductor components
Pattern transfer optical system
Speckle elimination by random spatial phase modulation Patent #: 4155630
ApplicationNo. 06/142473 filed on 04/21/1980
US Classes:359/202, X-Y scanner359/214, Single plane mirror element359/221Having planar rotating reflector with rotation axis in its plane
ExaminersPrimary: Henry, Jon W.
Attorney, Agent or Firm
International ClassesG02B 19/00 (20060101)
G03F 7/20 (20060101)
Foreign Application Priority Data1979-04-23 FR
AbstractAn illuminator for supplying a divergent illuminating beam from an area of predetermined energy distribution and dimensions comprising a coherent source whose image is formed in a plane by imaging means incorporating electrically controlled optical scanning means making it possible to displace the image in the said area in accordance with a predetermined law.